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BACK
MICRION
HT9800
ION COLUMN system was taken out of service
6/1/2000 and packaged. Last service 4/24/2000.
Originally installed 1997. Top of the line
50 KV Micrion Gun; flood gun new 2/4/2000; also new source,
suppressor, extractor, tungsten shield at that time.
Accel Power Supply ax50-/100/1; Edwards scroll pump ESDP30A;
Varian Turbo V-550 969-9444 macro torr; Varian 969-9833 Vent
Valve; Seikosha VP-4500 Printer: XY Stage. 50KV highvoltage
variable power supply. Talked with servicing tech who
assured us of its good condition. Designed for
micro-machining. Same chamber as Flip Flop version but
no gas.
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